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I've never seen that error before, but if you're running a vm-series on AWS you should have the ability to open a support case so that TAC can help you out.
Is this a completely new instance that you're trying to spin-up or is this something that you've been actively working with already? If this was a new instance that you're just getting off the ground I'd just destroy it and rebuild personally. Additionally if it was something that I already had in production I'd probably do the exact same thing assuming that you've stored the configuration and can rebuilt easily enough.
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